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Hydrogen Passivation Caused by ‘Soft’ Sputter Etch Cleaning of Si

Published online by Cambridge University Press:  25 February 2011

A.S. Vercaemst ,
R.L. Van Meirhaeghe ,
W. Laflere  and
F. Cardon
A.S. Vercaemst
Affiliation:
Laboratorium voor Kristallografie en Studie van de Vaste Stof Department of Solid State Science, University of Ghent Krijgslaan 281/S1, B-9000 Gent, Belgium
R.L. Van Meirhaeghe
Affiliation:
Laboratorium voor Kristallografie en Studie van de Vaste Stof Department of Solid State Science, University of Ghent Krijgslaan 281/S1, B-9000 Gent, Belgium
W. Laflere
Affiliation:
Laboratorium voor Kristallografie en Studie van de Vaste Stof Department of Solid State Science, University of Ghent Krijgslaan 281/S1, B-9000 Gent, Belgium
F. Cardon
Affiliation:
Laboratorium voor Kristallografie en Studie van de Vaste Stof Department of Solid State Science, University of Ghent Krijgslaan 281/S1, B-9000 Gent, Belgium
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 337: Symposium B – Advanced Metallization for Devices and Circuits—Science, Technology and Manufacturing III , 1994 , 657
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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