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High Quantum Efficiency AlGaN/GaN Solar-Blind Photodetectors Grown by Metalorganic Chemical Vapor Deposition

Published online by Cambridge University Press:  21 March 2011

U. Chowdhury ,
M. M. Wong ,
C. J. Collins ,
B. Yang ,
T. G. Zhu ,
A. L. Beck ,
J. C. Campbell  and
R. D. Dupuis
U. Chowdhury
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
M. M. Wong
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
C. J. Collins
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
B. Yang
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
T. G. Zhu
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
A. L. Beck
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
J. C. Campbell
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
R. D. Dupuis
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
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Abstract

We report the growth, fabrication and characterization of back-illuminated AlGaN p-i-n photodetectors operating in the solar-blind wavelength range. A peak external quantum efficiency (EQE) of 45.5% (0.1A/W) was obtained at a wavelength of 270 nm. This EQE was obtained at zero volt bias and without the use of any anti-reflection coating on the back of the substrate. To our knowledge, this is the highest EQE reported to date for p-i-n photodetectors operating in the solar-blind wavelength range.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 693 , 2001 , I12.9.1
Copyright
Copyright © Materials Research Society 2002

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References

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