Hostname: page-component-857557d7f7-v2cwp Total loading time: 0 Render date: 2025-12-09T11:29:53.210Z Has data issue: false hasContentIssue false
  • English
  • Français

Hardness and Adhesion Measurements of Copper Metallizations by a Continuous Indentation Approach

Published online by Cambridge University Press:  25 February 2011

W.R. Lafontaine  and
Che-Yu Li
Che-Yu Li
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
Get access

Abstract

A continuous indentation test has been used to evaluate the difference in adhesion between copper films deposited on oxidized silicon substrates with different transition metalinterlayers. Variations in adhesion between samples with interlayers of Al,Cr,Ni,Ti and V correlated with the free energy of formation of the particular metal oxide present.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 163
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Doerner, M.F. and Nix, W.D., J. Mater. Res., 1, 601, (1986).Google Scholar
2. Doerner, M.F., Gardner, D.S., and Nix, W.D., J. Mater. Res. 1, 601, (1986).Google Scholar
3. Stone, D., LaFontaine, W.R., Alexopoulos, P., Wu, T.-W. and Li, Che-Yu, J. Mater. Res. 3(1), 141 (1988).Google Scholar
4. LaFontaine, W.R., Yost, B., Black, R.D. and Li, Che-Yu, J. Mater. Res. 5(10), 2101, (1990).Google Scholar
5. LaFontaine, W.R., Yost, B., and Li, Che-Yu, J. Mater. Res. 5(4), 776 (1990).Google Scholar
6. LaFontaine, W.R., Ph.D Dissertation, Cornell Univ, (1990).Google Scholar
7. LaFontaine, W.R., Paszkiet, C.A., Korhonen, M.A., and Li, Che-Yu, submitted for publication, J. Mater. Res. (1990).Google Scholar