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Growth of Self-Seeded Aluminum Nitride by Sublimation-Recondensation and Substrate Preparation

Published online by Cambridge University Press:  17 March 2011

J. Carlos Rojo ,
Glen A. Slack ,
Kenneth Morgan ,
Leo J. Schowalter  and
Michael Dudley
J. Carlos Rojo
Affiliation:
Crystal IS, Inc., Latham, NY 12110, U.S.A.
Glen A. Slack
Affiliation:
Crystal IS, Inc., Latham, NY 12110, U.S.A.
Kenneth Morgan
Affiliation:
Crystal IS, Inc., Latham, NY 12110, U.S.A.
Leo J. Schowalter
Affiliation:
Crystal IS, Inc., Latham, NY 12110, U.S.A. on sabbatical from Rensselaer Polytechnic Institute, Troy, NY 12180, U.S.A.
Michael Dudley
Affiliation:
SUNY, Stony Brook, NY 11794, U.S.A.
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Abstract

Bulk aluminum nitride boules have been grown at driving rates of 0.9mm/h by the self-seeded sublimation-recondensation technique. Up to 15mm diameter substrates cut from those boules present large single crystal grains that have been analyzed using different techniques. X-ray double crystal diffraction shows a full-width-at-half-maximum of around 100 arcsec and X-ray topography reveals extensive areas with a density of dislocations less than 104 cm−2. These substrates have been prepared by chemical mechanical polishing techniques to obtain a surface roughness of 1.4-1.6nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 639: Symposium G – GaN and Related Alloys-2000 , 2000 , G1.10
Copyright
Copyright © Materials Research Society 2001

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