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Fabrication And Characterization Of Polyimide Waveguides For Optical Interconnection

Published online by Cambridge University Press:  10 February 2011

L. Robitaille ,
C. L. Callender  and
J. P. Noad
L. Robitaille
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
C. L. Callender
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
J. P. Noad
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
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Abstract

This paper reports the fabrication and characterization of polyimide branching waveguides for on-chip optical signal distribution in GaAs-based optoelectronic integrated circuits (OEICs). Low-loss polyimide s-bends and splitters with good splitting ratios and angles considerably larger than similar structures made from inorganic (e.g. LiNbO3) and semiconductor (e.g. GaAs, InP) materials, have been successfully fabricated and tested. The effects of the radius of curvature, splitter angle and cladding materials on the optical losses are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 413: Symposium W – Electrical, Optical, and Magnetic Properties of Organic Solid State Materials III , 1995 , 305
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

[1] Ribot, H., Sansonetti, P. and Carenco, A., IEEE J. Quantum Electr. 26, 1930 (1990).Google Scholar
[2] Paul, D.K., Markey, B.J., Hefele, R.H. and Pontano, B.A., Proceedings of the SPIE 1849 Optoelectronic Interconnects, 342 (1993).Google Scholar
[3] Okamura, Y., Yoshinaka, S. and Yamamoto, S., Appl. Optics 22, 3892 (1983).Google Scholar
[4] Beuhler, A.J., Wargowski, D.A., Kowalczyk, T.C. and Singer, K.D., Proceedings of the SPIE 1849 Optoelectronic Interconnects, 92 (1993).Google Scholar
[5] Kowalczyk, T.C., Kosc, T., Singer, K.D., Cahill, P.A., Seager, C.H., Meinhardt, M.B., Beuhler, A.J. and Wargowski, D.A., J. Appl. Phys. 76, 2505 (1994).Google Scholar
[6] Beuhler, A.J., Wargowski, D.A., Singer, K.D. and Kowalczyk, T., Proceedings of the 44th Electr. Components and Tech. Conference, Washington, D.C., May 1–4, 1994, p. 618.Google Scholar
[7] Liang, J., Levenson, R. and Zyss, J., in Organic Thin Films for Photonic Applications Technical Digest, 1993, Vol.17 (Optical Society of America, Washington, D.C., 1993), p. 99.Google Scholar
[8] Leonberger, F.J. and Donnelly, J.P., in Guided-Wave Optoelectronics, ed. by Tamir, T. (Springer-Verlag, vol.26, New York, 1990), p. 317.Google Scholar
[9] Nishihara, H., Haruna, M. and Suhara, T., in Optical Integrated Circuits, ed. by Fischer, R.E. and Smith, W.J. (McGraw-Hill, New York, 1989), p. 245.Google Scholar