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Evolution of the Electrical Properties of Interconnects Under Electromigration Stress

Published online by Cambridge University Press:  10 February 2011

B.K. Jones ,
Jianping Guo ,
Yanzhong Xu  and
G. Trefan
B.K. Jones
Affiliation:
Department of Physics, Lancaster University, Lancaster, LA1 4YB, UK b.jones@lancaster.ac.uk
Jianping Guo
Affiliation:
Department of Physics, Lancaster University, Lancaster, LA1 4YB, UK b.jones@lancaster.ac.uk
Yanzhong Xu
Affiliation:
Department of Physics, Lancaster University, Lancaster, LA1 4YB, UK b.jones@lancaster.ac.uk
G. Trefan
Affiliation:
Department of Physics, Lancaster University, Lancaster, LA1 4YB, UK b.jones@lancaster.ac.uk
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Abstract

We report experimental results of measurements of the changes in the resistance and thermal non-linearity of a variety of samples during accelerated electromigration stress to failure. The value of the extra measurement of the second harmonic of the AC bridge signal is illustrated by observations of changes in the thermal conductance to the substrate and the temperature coefficient of resistivity which are not detected by the resistance measurement. These quantities are also larger than the resistance measurement.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 516: Symposium E – Low Dielectric Constant Materials IV , January 1998 , 9
Copyright
Copyright © Materials Research Society 1998

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References

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