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Electric Field Direct Force in Electromigration Mechanism

Published online by Cambridge University Press:  10 February 2011

A.A. Karpushin ,
A.N. Sorokin ,
M.R. Baklanov  and
K. Maex
A.A. Karpushin
Affiliation:
Institute of Semiconductor Physics SB RAS, 630090 Novosibirsk, Russia
A.N. Sorokin
Affiliation:
Institute of Semiconductor Physics SB RAS, 630090 Novosibirsk, Russia
M.R. Baklanov
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
K. Maex
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Abstract

The direct influence of the applied electric field on ions of lattice, as a whole, was considered. This influence induces the strains and stresses and its gradients. In turn, this additional stresses may induce the vacancy (ion) diffusion flux. It is shown that this flux coincides in the direction and is comparable in magnitude with the electromigration flux induced by the electron wind.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 516: Symposium E – Low Dielectric Constant Materials IV , January 1998 , 195
Copyright
Copyright © Materials Research Society 1998

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