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Elastic Properties and Stresses in Polyimide thin Films and Coatings

Published online by Cambridge University Press:  21 February 2011

Kapil C. Sheth ,
Michael Chen  and
Richard J. Farris
Kapil C. Sheth
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
Michael Chen
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
Richard J. Farris
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
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Abstract

Polyimide thin films and coatings (< 20μm) for electronic applications have been fully characterized. Analysis of residual stresses and determination of all 21 anisotropic constants are necessary for a better understanding of these coatings in complex geometries. The residual stresses have been measured by a real-time vibrational holographic interferometry technique. The number of elastic constants is reduced to 9 independent constants by finding the orthotopic axes. All the 9 orthotropic constants - 3 normal compliances, 3 shear compliances and 3 independent Poisson’s ratios - have been determined. Moisture diffusion constants have also been measured.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 529
Copyright
Copyright © Materials Research Society 1995

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