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Effects of Excimer Laser Ablation on the Surface of Hexagonal Boron Nitride

Published online by Cambridge University Press:  26 February 2011

G. L. Doll ,
T. A. Perry  and
J. A. Sell
G. L. Doll
Affiliation:
General Motors Research Laboratories, 30500 Mound Road, Warren, MI 48090
T. A. Perry
Affiliation:
General Motors Research Laboratories, 30500 Mound Road, Warren, MI 48090
J. A. Sell
Affiliation:
General Motors Research Laboratories, 30500 Mound Road, Warren, MI 48090
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Abstract

The laser-induced changes in the hexagonal boron nitride targets that are used in the deposition of pulsed laser-deposited cubic boron nitride films are examined. Although the structure of the hexagonal boron nitride in the irradiated areas is unaltered, the surface morphology changes considerably. Boron-rich spheroids were found to cover the irradiated area. Their origin is consistent with the hydrodynamic sputtering of the hexagonal boron nitride targets, and a liberation of nitrogen atoms to the gas phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 207
Copyright
Copyright © Materials Research Society 1991

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