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Effects of Electrode Configurations on Internal Stress Distribution of Multilayer Actuators

Published online by Cambridge University Press:  01 February 2011

Dong-Kyun Lee ,
Ji-Won Choi ,
Deuk-Young Han ,
Hyun-Jai Kim  and
Seok-Jin Yoon
Dong-Kyun Lee
Affiliation:
Department of Electrical Engineering, Konkuk University, Seoul, 143–701, Korea
Ji-Won Choi
Affiliation:
Thin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 130–650, Korea
Deuk-Young Han
Affiliation:
Department of Electrical Engineering, Konkuk University, Seoul, 143–701, Korea
Hyun-Jai Kim
Affiliation:
Thin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 130–650, Korea
Seok-Jin Yoon
Affiliation:
Thin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 130–650, Korea
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Abstract

The internal stress distribution in multilayer actuator was analyzed by a numerical simulation. Around the edge of conventional inter-digital electrodes, the non-uniform electric field generated the stress concentration, which caused the ceramic to crack. Various electrode configurations were presented to decrease this stress concentration. Especially the float electrode type is a promising design because this can be fabricated using almost the same process as the conventional multilayer actuator, and the simulated results indicted that the float electrode type decreased the stress concentration of inter-digital type in approximately 1/3.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003 , D6.9
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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