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Development of New Materials by Ionized-Cluster Beam Technique

Published online by Cambridge University Press:  25 February 2011

T. Takagi
T. Takagi*
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto 606, Japan
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Abstract

In the Ionized-Cluster Beam (ICB) technique, deposition by macroaggregates consisting of 500 to 2000 atoms loosely coupled together involves low ratios of charge to mass. Consequently, high mass density beams at low equivalent energy per atom in an optimum range for film formation can be transported without problems due to space charge repulsion forces and deposition onto insulating substrates is easily possible due to low accumulation of ion charge. The presence of ionic charge has great influence upon film formation mechanisms in spite of low content of ions in the total flux. Also, because of the kinetics of cluster breakup upon impact, enhancement of migration of adatoms upon a substrate surface can be achieved by increasing the acceleration voltage. It is possible to control the mechanical, crystallographic, optical and magnetic properties of films over three dimensions by variation of acceleration voltage or ion content in the total flux. Films of many materials have been formed at low temperatures with well-controlled characteristics. Among examples of interest are included metal and semiconductor material films for functional devices and VLSI applications, intermetallic compound films for magnetic or thermoelectric uses and organic material films. Results suggest that ICB offers exceptional potential for applications involving formation of new materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 501
Copyright
Copyright © Materials Research Society 1984

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References

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