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Determination of Eigenstresses from Curvature Data

Published online by Cambridge University Press:  15 February 2011

Mauro Ferrari  and
Marie Weber
Mauro Ferrari
Affiliation:
University of California, Berkeley, Department of Civil Engineering, and Department of Materials Science and Minerals Engineering, Berkeley CA
Marie Weber
Affiliation:
University of California, Berkeley, Department of Civil Engineering, Berkeley CA.
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Abstract

Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 221
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Krulevitch, P., Johnson, G. C. and Howe, R. T., MRS Fall 1991 Meeting, Boston, Symposium D.Google Scholar
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4. Ferrari, M., J. Thermal stresses (to appear).Google Scholar