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Conformal deposition of a silicon-oxide and a fluorocarbon on a nano-shaped material in supercritical carbon dioxide

Published online by Cambridge University Press:  01 February 2011

Takashi Shimizu ,
Kenichi Ishii  and
Eiichi Suzuki
Takashi Shimizu
Affiliation:
t-shimizu@aist.go.jp, Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki, 3058568, Japan, +81-298-61-5410, +81-298-61-5170
Kenichi Ishii
Affiliation:
ken.ishii@aist.go.jp, Advanced Industrial Science and Technology, Japan
Eiichi Suzuki
Affiliation:
e.suzuki@aist.go.jp, Advanced Industrial Science and Technology, Japan
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Abstract

A novel surface engineering of nano-shaped materials, i.e., surface coating in supercritical fluid is proposed. Conformal deposition of a silicon-oxide thin film in supercritical carbon dioxide (scCO2) where O2 gas is miscible as an oxidizing agent is demonstrated. A uniform silicon-oxide film has been deposited even on backside of a nano-shaped SiO2, which is hard in the standard chemical vapor deposition. Filling of a Si-oxide into the horizontal gap has also been successfully achieved. Deposition of a fluorocarbon in scCO2 were tried to investigate surface modification using scCO2 and a hydrophilic SiO2 surface became water-repellent after the surface modification. These results indicate that the developed surface engineering in the supercritical fluid is promising technology in nanoscale device fabrication and micro (nano-) electromechanical systems.

Keywords

coatingnanostructuremicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y08-14
Copyright
Copyright © Materials Research Society 2006

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References

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