A novel surface engineering of nano-shaped materials, i.e., surface coating in supercritical fluid is proposed. Conformal deposition of a silicon-oxide thin film in supercritical carbon dioxide (scCO2) where O2 gas is miscible as an oxidizing agent is demonstrated. A uniform silicon-oxide film has been deposited even on backside of a nano-shaped SiO2, which is hard in the standard chemical vapor deposition. Filling of a Si-oxide into the horizontal gap has also been successfully achieved. Deposition of a fluorocarbon in scCO2 were tried to investigate surface modification using scCO2 and a hydrophilic SiO2 surface became water-repellent after the surface modification. These results indicate that the developed surface engineering in the supercritical fluid is promising technology in nanoscale device fabrication and micro (nano-) electromechanical systems.