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Composite X-ray Waveguide-Resonator as a Background for the New Generation of the Material Testing Equipment for Films on Si Substrates

Published online by Cambridge University Press:  01 February 2011

V.K. Egorov  and
E.V. Egorov
V.K. Egorov
Affiliation:
IPMT RAS, Chernogolovka, Moscow district, Russia 142432
E.V. Egorov
Affiliation:
IPMT RAS, Chernogolovka, Moscow district, Russia 142432
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Abstract

Experimental research of the first composite planar X-ray waveguide-resonator (CPXWR) is presented. Model for an X-ray beam penetration across CPXWR is proposed. The model shows that the experimental data can be interpreted as the effect of the X-ray beam angle tunneling across small gap between two waveguide-resonators aligned consecutive. The assumption been made that the effect may open the key for the mechanism understanding of a hard electromagnetic radiation beam's management. Possibilities of the CPXWR practical using for creation of the X-ray new generation equipment for testing of thin film coating on Si substrates are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 716: Symposium B – Silicon Materials-Processing, Characterization, and Reliability , 2002 , B4.15
Copyright
Copyright © Materials Research Society 2002

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