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Characterization of Sol-Gel Derived (Pb,Ba)(Zr,Ti,Nb)O3 Thin Films for Optical Waveguide Development

Published online by Cambridge University Press:  15 February 2011

P. F. Baude ,
J. S. Wright ,
C. Ye ,
L. F. Francis  and
D. L. Polla
P. F. Baude
Affiliation:
Microelectromechanical Systems Center Electrical Engineering Department
J. S. Wright
Affiliation:
Chemical Engineering and Materials Science Department, University of Minnesota, 200 S. E. Union Street, Minneapolis, MN 55455
C. Ye
Affiliation:
Microelectromechanical Systems Center Electrical Engineering Department
L. F. Francis
Affiliation:
Chemical Engineering and Materials Science Department, University of Minnesota, 200 S. E. Union Street, Minneapolis, MN 55455
D. L. Polla
Affiliation:
Microelectromechanical Systems Center Electrical Engineering Department
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Abstract

(PbBa)(ZrTiNb)03 thin films and powders have been prepared using the sol-gel technique. Solutions were synthesized in 2-methoxyethanol based upon our previous PZT solution preparation. Three different approaches were used for incorporating barium into PZT alkoxide solutions. Thermal analysis and x-ray diffraction results indicated that barium methoxypropoxide gave the best results. PBZTN (71% Pb and 71% Zr) was deposited onto sapphire substrates as well as oxidized silicon substrates. Optical transmission measurements showed greater than 80% transmission for wavelengths longer than 400 nm. Films with thickness of 3000 Å on sapphire exhibited a refractive index of 2.19 at λ=633 nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 445
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. Ye, C., Tamagawa, T., Schiller, P., and Polla, D. L., Sensors and Actuators A, 35, 77–83, 1992 CrossRefGoogle Scholar
2. Baude, P. F., Ye, C., Tamagawa, T., and Polla, D. L, J. Appl. Phys. 73, 7960 (1993)CrossRefGoogle Scholar
3. Ikeda, T., J. Phys. Soc. Japan 14, 168 (1959)CrossRefGoogle Scholar
4. Thacher, P. D., J. Appl. Phys. 41, 4790 (1970)CrossRefGoogle Scholar
5. Swartz, S. L., Melling, P. J., Bright, S. J., and Shrout, T. R., Ferroelectrics 108, 71 (1990)CrossRefGoogle Scholar
6. Baude, P. F., Ye, C., and Polla, D. L., Ferroelectric Thin Films II. edited by Kingon, A. I, Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Proc. 243, Pittsburgh, PA (1992) pp. 275–280 Google Scholar
7. Polla, D. L, Ye, C., and Tamagawa, T., Appl. Phys. Lett. 59, 3539, 1991 CrossRefGoogle Scholar
8. Haertling, G., presented at the 6th International Symposium on Integrated Ferroelectrics, Monterey, CA, 1994 Google Scholar
9. budd, K. D., Dey, S. K., and Payne, D. A., Brit. Ceram. Proc. 36, 107 (1989)Google Scholar