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Characterization of Defect Structures in Lely 6H-SiC Single Crystals Using Synchrotron White Beam X-Ray Topography

Published online by Cambridge University Press:  15 February 2011

W. Huang ,
S. Wang ,
M. Dudley ,
P. Neudeck ,
J. A. Powell  and
C. Fazi
W. Huang
Affiliation:
Dept. of Materials Science and Engineering, SUNY at SB, Stony Brook, NY1 1794–2275
S. Wang
Affiliation:
Dept. of Materials Science and Engineering, SUNY at SB, Stony Brook, NY1 1794–2275
M. Dudley
Affiliation:
Dept. of Materials Science and Engineering, SUNY at SB, Stony Brook, NY1 1794–2275
P. Neudeck
Affiliation:
NASA Lewis Research Center, 21000 Brookpark Road, MS 77–1, Cleveland, Ohio 44135
J. A. Powell
Affiliation:
NASA Lewis Research Center, 21000 Brookpark Road, MS 77–1, Cleveland, Ohio 44135
C. Fazi
Affiliation:
U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783, USA
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Abstract

Defect structures in Lely SiC single crystals have been studied using synchrotron white beam X-ray topography. Basal plane dislocations and stacking faults probably generated during post-growth cooling are clearly revealed. For both perfect dislocations and partial dislocations bounding the stacking faults, Burgers vectors and line directions are determined from contrast extinction analysis as well as projected direction analysis on different topographic images. The fault planes and fault vectors of the stacking faults were determined using contrast extinction analysis. Possible dislocation generation mechanisms are briefly discussed.

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