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Application of Holographic Interferometry to Flow Pattern Visualization in an RTCVD Reactor

Published online by Cambridge University Press:  10 February 2011

Yu. P. Rainova ,
J. Pezoldt ,
K. I. Antonenko  and
G. Eichhom
Yu. P. Rainova
Affiliation:
Department of Physical Chemistry Fundamentals of Microelectronic Technology. Moscow State Institute of Electronic Engineering, 103498 Moscow, Russian Federation
J. Pezoldt
Affiliation:
Institut für Festkörperelektronik, TU Ilmenau, Postfach 0565, D-98684 Ilmenau, Germany, spiess@e-technik.tu-ilmenau.de
K. I. Antonenko
Affiliation:
Department of Physical Chemistry Fundamentals of Microelectronic Technology. Moscow State Institute of Electronic Engineering, 103498 Moscow, Russian Federation
G. Eichhom
Affiliation:
Institut für Festkörperelektronik, TU Ilmenau, Postfach 0565, D-98684 Ilmenau, Germany, spiess@e-technik.tu-ilmenau.de
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Abstract

This paper presents the development of an experimental technique for the reception of holographic interferograms of H2 and Ar flows in a RTCVD reactor with a complex geometry. The obtained holographic patterns were analyzed for the reconstruction of the gas flow in the RTCVD reactor. The fringe patterns showing the gas density distributions were recalculated into temperature distributions. Experimental results were compared with the predicted flow field.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 429: Symposium N – Rapid Thermal and Integrated Processing V , 1996 , 65
Copyright
Copyright © Materials Research Society 1996

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