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Analysis of Stresses at Singular Points of Patterned Structures

Published online by Cambridge University Press:  21 February 2011

A. Chouaf ,
O. Loppin ,
M. Ignat  and
J.M. Terriez
A. Chouaf
Affiliation:
Institut National Plytechnique de Grenoble, ENSEEG BP 75, Dom Univ, 38402 Saint-Martin d'Hères, France
O. Loppin
Affiliation:
Laboratoire de Mé;canique, UFR des Sciences de Reims, BP 347, Reims, France
M. Ignat
Affiliation:
Institut National Plytechnique de Grenoble, ENSEEG BP 75, Dom Univ, 38402 Saint-Martin d'Hères, France
J.M. Terriez
Affiliation:
Institut National Plytechnique de Grenoble, ENSEEG BP 75, Dom Univ, 38402 Saint-Martin d'Hères, France
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Abstract

An iterative method describing the stress state at the vicinity of singularity point is presented here. This approach is based on concepts of rupture mechanics, uses classical solutions from finite element calculations and concerns plane problems. Through this approach, the stress state at the vicinity of several types of singular points in a patterned structure were analysed. The obtained results can be discussed according to failure mecanisms.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 309: Symposium M2 – Materials Reliability in Microelectronics III , 1993 , 211
Copyright
Copyright © Materials Research Society 1993

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