Hostname: page-component-54dcc4c588-tfzs5 Total loading time: 0 Render date: 2025-10-03T17:02:15.764Z Has data issue: false hasContentIssue false
  • English
  • Français

When Organometallic Chemistry and Metal Oxide Nanoparticles Meet Optimized Silicon-based Gas Sensor

Published online by Cambridge University Press:  01 February 2011

Pamela Yoboue ,
Philippe Menini ,
Andre Maisonnat ,
Myrtil Kahn ,
Katia Fajerwerg ,
Bruno Chaudret  and
Pierre Fau
Pamela Yoboue
Affiliation:
pyoboue@laas.fr, LAAS CNRS, Toulouse, France
Philippe Menini
Affiliation:
menini@laas.fr, LAAS CNRS, Toulouse, France
Andre Maisonnat
Affiliation:
maisonat@lcc-toulouse.fr, LCC CNRS, Toulouse, France
Myrtil Kahn
Affiliation:
kahn@lcc-toulouse.fr, LCC CNRS, Toulouse, France
Katia Fajerwerg
Affiliation:
fajerwerg@lcc-toulouse.fr, LCC CNRS, Toulouse, France
Bruno Chaudret
Affiliation:
chaudret@lcc-toulouse.fr, LCC CNRS, Toulouse, France
Pierre Fau
Affiliation:
fau@lcc-toulouse.fr, LCC CNRS, Toulouse, France
Get access

Abstract

A robust silicon gas sensor chip (platinum heater, low deformation membrane) has been designed and successfully operated with various metal oxide nanoparticles synthesized by an organometallic route (SnO2, ZnO) and deposited by a generic ink-jet method. High quality and micron thick layers are obtained and the CO gas sensitivity is presented.

Keywords

sensorgrain sizemicroelectronics

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

[1] Khadayate, R. S. and Patil, P. P. Journal of Optoelectronics and Advanced Materials 12 (2010) 1338.Google Scholar
[2] Itoh, T. Matsubara, I. Kadosaki, M. Sakai, Y. Shin, W. Izu, N. and Nishibori, M. Sensors and Materials 21 (2009) 251.Google Scholar
[3] Pijolat, C. Riviere, B. Kamionka, M. Viricelle, J. P. and Breuil, P. Journal of Materials Science 38 (2003) 4333.Google Scholar
[4] Bhat, N. Jayaraman, B. Pratap, R. Bagga, S. and Mohan, S. 2009 2nd International Workshop on Electron Devices and Semiconductor Technology (2009) 31.Google Scholar
[5] Reyes-Barranca, M. A., Gonzalez-Vidal, J. L. and Tavira-Fuentes, A., Revista Mexicana De Fisica E 54 (2008) 15.Google Scholar
[6] Udina, S. Carmona, M. Carles, G. Santander, J. Fonseca, L. and Marco, S. Sensors and Actuators B-Chemical 134 (2008) 551.Google Scholar
[7] Nayral, C. Viala, E. Fau, P. Senocq, F. Jumas, J. C. Maisonnat, A. and Chaudret, B. Chemistry-a European Journal 6 (2000) 4082.Google Scholar
[8] Monge, M. Kahn, M. L. Maisonnat, A. and Chaudret, B. Angewandte Chemie-International Edition 42 (2003) 5321.Google Scholar
[9] Nayral, C. Ould-Ely, T., Maisonnat, A. Chaudret, B. Fau, P. Lescouzres, L. and Peyre-Lavigne, A., Advanced Materials 11 (1999) 61.Google Scholar
[10] Yamazoe, N. Sensors and Actuators B-Chemical 108 (2005) 2.Google Scholar
[11] Ding, Z. Wang, J. An, C. Ren, D. and Hou, Z. Chuangan Jishu Xuebao 19 (2006) 78.Google Scholar