Hostname: page-component-669899f699-chc8l Total loading time: 0 Render date: 2025-04-26T04:13:56.371Z Has data issue: false hasContentIssue false
  • English
  • Français

Water Transport Across Modified Polyimide Surfaces: Ion-Bombarded PMDA-ODA and BPDA-PDA

Published online by Cambridge University Press:  15 February 2011

H.M. Clearfield ,
B.K. Furman ,
F. Bailey ,
N. Sheth  and
S. Purushothaman
H.M. Clearfield
Affiliation:
IBM Research, P.O. Box 218, Yorktown Heights, NY.
B.K. Furman
Affiliation:
IBM Research, P.O. Box 218, Yorktown Heights, NY.
F. Bailey
Affiliation:
IBM Research, P.O. Box 218, Yorktown Heights, NY.
N. Sheth
Affiliation:
IBM Research, P.O. Box 218, Yorktown Heights, NY.
S. Purushothaman
Affiliation:
IBM Research, P.O. Box 218, Yorktown Heights, NY.
Get access

Abstract

Durability of metal/polyimide (PI) interfaces is essential for the long term reliability of advanced microelectronics packages. In earlier work, we showed that water absorbed by the PI can affect durability because, at high temperatures, it migrates to the interface and oxidizes the metal. In this study, we have investigated water transport through PMDA-ODA and BPDA-PDA polyimides as a function of ion beam treatment. Thermal desorption mass spectrometry (TDS) and gravimetric water uptake measurements were correlated with XPS spectra obtained from modified films. Transport through films with unmodified surfaces is rapid as shown by water uptake, however uptake is slowed considerably by surface modification. Additionally, only modified films exhibit peaks in TDS spectra–the peak temperature and intensity scale with dose. High resolution XPS spectra taken after modification suggest a graphitic-like surface region independent of dose. However, the extent of this “damaged” region scales with the dose. From the TDS spectra, we determine that the activation energy for water diffusion through this layer is 12–15 kcal/mol.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 264: Symposium G – Electronic Packaging Materials Science VI , 1992 , 237
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Furman, B.K., Purushothaman, S., Castellani, E. and Renick, S., Proc. Symp. Multilevel Metallization, Inter- connect. and Contact Tech., eds. Rothman, L. and Herndon, T. (Electrochem. Soc., Pennington, NJ, 1987), p. 142.Google Scholar
2. Furman, B.K., Childs, K.D., Clearfield, H.M., Davis, R. and Purushothaman, S., J. Vac. Sci. Technol. A10 (1992), in press.Google Scholar
3. Furman, B.K., Neugroschl, D. and Purushothaman, S., Proc. 2nd Symp. Metallized Plastics, edited by Mittal, K. (Electrochem. Soc., Montreal, 1992), in press.Google Scholar
4. Sacher, E. and Susko, J.R., J. Appl. Polymer Sci. 23, 2355 (1979).Google Scholar
5. Denton, D.D., Day, D.R., Priore, D.F., Senturia, S.D., Enolick, E. and Scheider, D., J. Electron. Mater..10, 647 (1985).Google Scholar
6. Denton, D.D. and Pranjoto, H., Mater. Res. Soc. Symp. Proc. 154, 97 (1989).Google Scholar
7. Moylan, C.R., Best, M.E. and Ree, M., J. Polym. Sci. B: Polymer Physics 29, 87 (1991).Google Scholar
8. There has been one reported study of iodine transport across ion-beam modified polyimide, e.g., Vanderlinde, W.E., Mills, P.J., Kramer, E.J. and Ruoff, A., J. Vac. Sci. Technol B 3, 1362 (1985).Google Scholar
9. Bachman, B.J. and Vasile, M.J., J. Vac. Sci. Technol. A 7, 2709 (1989).CrossRefGoogle Scholar
10. White, R.C. and Ho, P.S., in Handbook of Ion Beam Processing Technology, edited by Cuomo, J.J., Rossnagel, S.M. and Kaufman, H.R. (Noyes, 1989), p. 315.Google Scholar
11. Crank, J., The Mathematics of Diffusion, (Clarendon Press, Oxford, 1975).Google Scholar
12. Clearfield, H.M. and Furman, B.K., unpublished results.Google Scholar