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Ultrasonic Force Microscopic Characterization of Nanosized Copper Particles

Published online by Cambridge University Press:  21 February 2011

E. J. Schumaker ,
L. Shen ,
M. J. Ruddell ,
S. Sathish  and
P. T. Murray
E. J. Schumaker
Affiliation:
Center for Materials Diagnostics, University of Dayton Research Institute, 300 College Park, Dayton, hio 45469-0121
L. Shen
Affiliation:
Center for Materials Diagnostics, University of Dayton Research Institute, 300 College Park, Dayton, hio 45469-0121
M. J. Ruddell
Affiliation:
Center for Materials Diagnostics, University of Dayton Research Institute, 300 College Park, Dayton, hio 45469-0121
S. Sathish
Affiliation:
Center for Materials Diagnostics, University of Dayton Research Institute, 300 College Park, Dayton, hio 45469-0121
P. T. Murray
Affiliation:
Research Institute & Graduate Materials Engineering, University of Dayton, 300 College Park, Dayton, hio 45469-0160
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Abstract

An Ultrasonic Force Microscope capable of imaging elastic modulus variations with nanometer resolution has been developed by modifying a Scanning Probe Microscope. Images of ultrasonic properties have been simultaneously obtained with the topography images. The technique has been utilized to characterize nanoscale copper droplets and grains deposited on a quartz substrate by ionized cluster beam deposition. Images of the same region obtained with atomic force microscope, lateral force microscope, and ultrasonic force microscope are compared. The origin of image contrast in ultrasonic force microscopy and its utilization for quantitative elastic property measurement of nanometer particles are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 581: Symposium F – Nanophase & Nanocomposite Materials II , 1999 , 473
Copyright
Copyright © Materials Research Society 2000

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References

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