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Threshold for Single Excimer Laser Pulse Backside Removal of Thin Metal Films from Optical Quartz

Published online by Cambridge University Press:  26 February 2011

R. J. Baseman  and
J. C. Andreshak
R. J. Baseman
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
J. C. Andreshak
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

The minimum energy in a 248 nm, 25 ns long excimer laser pulse required to remove thin Au and Cr films from optical quartz has been measured. Heating of the films by the laser has been modelled with a finite element calculation. Assuming that at threshold, all of the laser energy contributes to film removal, the calculations show that the gold films are removed when the heated gold surface reaches the atmospheric boiling point, and that temperatures well in excess of the atmospheric boiling point are required to remove the Cr films, with the required temperatures increasing with film thickness.

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References

REFERENCES

1). Bohandy, J., Kim, B.F., Adrian, F.J., J. Appl. Phys., 60 , 1538 (1986).Google Scholar
2). Friichtenicht, J.F., Rev. Sci. Instrum., 45 , 51 (1974).Google Scholar
3). Kadota, K., Pospieszczyk, A., Bogen, P., Hintz, E., IEEE Trans. Plas. Sci., PS–12 , 264 (1984); E. Hintz, P. Bogen, J. Nuc. Mat., 128–129 , 229 (1984); T. Yamauchi, S. Sengoku, M. Nagami, H. Maeda, S. Kasai, T. Sugie, H. Kimura, T. Matoba, Jap J. App. Phys., 20 , 1299 (1981).Google Scholar
4). Baseman, R.J., Gupta, A., Sausa, R.C., Progler, C., Symp B, Fall 1987 MRS Meeting, Boston, MA.Google Scholar
5). Adrian, F.J.,, Bohandy, J., Kim, B.F., Jette, A.N., Thompson, P., J. Vac. Sci. Tech. B5 , 1490 (1987).Google Scholar
6). Breton, C., Michelis, C. de, Hecq, W., Mattioli, M., Rev. Phys. Appl. 15 1193 (1980); E.S. Marmar, J.L. Cecchi, S.A. Cohen, Rev. Sci. Instrum., 46 , 1149 (1975); K. Kadota, etal , Rev. Sci. Instrum., 56 , 1036 (1985);Y.T. Lie, A. Pospieszczyk, J.A. Tagle, Fus. Tech., 6 , 447 (1984); R. Koppmann, S.M. Refaei, A. Pospieszczyk, J. Vac. Sci. Tech., A-4 , 79 (1986); J.S. Bakos, P.N. Ignacz, J. Szigeti, J. Kovacs, Appl. Phys. Lett., 51 , 734 (1987); D. Manos, D. Ruzic, R. Moore, S Cohen, J. Vac. Sci Tech., 20 , 1230 (1982).CrossRefGoogle Scholar
7) Palik, E.D., Ed., Handbook of Optical Constants of Solids (Academic Press, New York, 1985).Google Scholar
8) Touloukian, Y.S. Sr. Ed., Thermophysical Properties of Matter , Vol.12, (Plenum Publishing, 1975), pp.61, 125; Vol 1, (Plenum Publishing, 1970), pp 63, 173.Google Scholar
9) Weast, R.C., Ed., CRC Handbook of Chemistry and Physics. 60th Edition , (CRC Press, Boca Raton, FL, 1981), p.D–62.Google Scholar
10) Dean, J.A., Ed., Lange's Handbook of Chemistry, 13th edition , (McGraw Hill, 1985), pp.9–114, 9–116.Google Scholar
11) Gupta, A., Alcorn, R., Andreshak, J.C., unpublished results.Google Scholar