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Test Methods for Characterizing Piezoelectric Thin Films

Published online by Cambridge University Press:  10 February 2011

F. J. von Preissig ,
H. Zeng  and
E. S. Kim
F. J. von Preissig
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
H. Zeng
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
E. S. Kim
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
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Abstract

Two experimental techniques for quantifying MEMS-relevant material constants of piezoelectric thin films are presented. The first is an improved version of our recently developed ‘plank method.’ This technique is used to determine the product of the biaxial elastic modulus and the piezoelectric constant d 31. The updated method is easier and more precise, and it utilizes the results of dynamic as well as improved static finite-element analyses. The second method is the bulge test, here emphasizing the special requirements of piezoelectric and fragile films. Results from both techniques applied to zinc oxide are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 117
Copyright
Copyright © Materials Research Society 1998

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References

1 Reid, R. P., Kim, E. S., Hong, D. M., and Muller, R. S., J. Microelectromech. Syst. 2, 111 (1993).Google Scholar
2 Mullem, C. J. Van, Blom, F. R., Fluitman, J. H. J., and Elwenspoek, M., Sensors Actuators A21–27, 379 (1991).Google Scholar
3 Itoh, T., Ohashi, T., and Suga, T., IEICE Trans. Electron. E78–C, 146 (1995).Google Scholar
4 ANSI/IEEE Std 176-1987 (IEEE, New York, 1987), pp. 13–15.Google Scholar
5 Preissig, F. J. von, Zeng, H., and Kim, E. S., Smart Mater. Struct. 7 (1998) (in press).Google Scholar
6 Optodyne Inc., Compton, CA, product literature.Google Scholar
7 Vlassak, J. J. and Nix, W. D., J. Mater. Res. 7, 3242 (1992).Google Scholar
8 Keiner, H., Preissig, F. J. von, Zeng, H., Nejhad, M. N. G., and Kim, E. S., in Mater. Res. Soc. Proc. 505, to be published.Google Scholar