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Surface Topography of Thin Au and Pd Films After Ion Bombardment Studied With STM

Published online by Cambridge University Press:  15 February 2011

K. P. Reimann ,
A. Rehmet ,
W. Bolse  and
U. Geyer
K. P. Reimann
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
A. Rehmet
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
W. Bolse
Affiliation:
II. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 3-5, 37073 Göttingen, Germany.
U. Geyer
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
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Abstract

The changes in surface topography of thin metallic films during ion bombardment were investigated with STM. Pd and Au thin films, having defect-free, atomically flat areas over at least 300×300Å2 were bombarded with Ar+, Kr+, Xe+ ions. Ion energies and target temperatures were varied. The roughening after high fluence irradiation shows scaling with a roughness exponent 0.84. For 300 K target temperature we observe, both for Au and Pd, 3 D erosion, for 700 K, on the contrary, layer-by-layer erosion. The differences in erosion morphologies between Au and Pd surfaces are supposed to stem from differences in surface mobility of adatoms.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 439: Symposium B – Microstructure Evolution During Irradiation , 1996 , 361
Copyright
Copyright © Materials Research Society 1997

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References

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