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Structural-Chemical Properties of InP Own Oxides

Published online by Cambridge University Press:  21 February 2011

Gennady S. Korotchenkov  and
Valery A. Skryshevsky
Gennady S. Korotchenkov
Affiliation:
Laboratory of Microelectronics, Technical University of Moldova, Stefan eel Mare, 168, Chisinau, 277012, Moldova.
Valery A. Skryshevsky
Affiliation:
Department of Physics of Semiconductors, Kiev State University, Vladimirskay a 64, Kiev, 252017 Ukraine
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Abstract

In this article the analysis of IR reflection-absorption spectra of InP own oxides, formed by anodic, thermal and chemical oxidation was made. The influence of oxidation methods, heat treatment and presence of metal covering at the outside surface of own oxides on their structural-chemical properties were determined. On the basis of received results, the explanations of the causes of the change in electrophysical properties of InP own oxides were obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 355: Symposium B1 – Evolution of Thin-Film and Surface Structure and Morphology , 1994 , 497
Copyright
Copyright © Materials Research Society 1995

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References

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