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Observation of Crystallization, Precipitation, and Phase Transformation Phenomena in Si Rich Titanium Silicide Thin Films

Published online by Cambridge University Press:  21 February 2011

A. Domenicucci ,
G. Gifford  and
L.A. Clevenger
A. Domenicucci
Affiliation:
IBM Microelectronics, Hopewell Jet., N. Y. 12533, IBM T.J. Watson Research Center, Yorktown Heights, N.Y. 10598.
G. Gifford
Affiliation:
IBM Microelectronics, Hopewell Jet., N. Y. 12533, IBM T.J. Watson Research Center, Yorktown Heights, N.Y. 10598.
L.A. Clevenger
Affiliation:
IBM Microelectronics, Hopewell Jet., N. Y. 12533, IBM T.J. Watson Research Center, Yorktown Heights, N.Y. 10598.
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Abstract

Crystallization, precipitation, and phase transformation phenomena were observed in titanium suicide thin film samples during in situ heating experiments in a transmission electron microscope. The as-deposited TixSiy films were 110 nm in thickness with a composition of 1 Ti to 2.33 Si. Crystallization of the C49 phase was followed isothermally near the sputter deposition temperature. The movement of individual grain boundaries was recorded so that a “velocity of crystallization” could be calculated. The precipitation of excess silicon from the C49 phase was first observed in the 650°C to 750°C temperature range. The precipitates were predominantly of the incoherent type, with a smaller number existing at the grain boundaries. Ostwald ripening then occurred up to the C49 to C54 phase transformation which was accompanied by a dramatic increase in grain size. Grain boundary movement during the phase transformation was such that large precipitates, which were originally at C49-C49 boundaries, ended up within resulting C54 crystals. Many of these larger precipitates were found to exist as epitaxial “islands” at the TiSi2/Si substrate interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 398: Symposium C – Thermodynamics and Kinetics of Phase Transformations , 1995 , 463
Copyright
Copyright © Materials Research Society 1998

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References

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