Hostname: page-component-745bb68f8f-s22k5 Total loading time: 0 Render date: 2025-02-04T15:46:14.912Z Has data issue: false hasContentIssue false
  • English
  • Français

Microstructural Evolution of TiO2 Sol-Gel Thin Films

Published online by Cambridge University Press:  28 February 2011

J.L. Keddie  and
E.P. Giannelis
J.L. Keddie
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
E.P. Giannelis
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
Get access

Abstract

Backscattering spectrometry has been used to determine the density of TiO2 sol-gel films. The density of the as-deposited films relative to that of anatase varies slightly with respect to deposition conditions and is approximately 0.5. Annealing at temperatures as high as 750°C increases the relative density to 0.7 with concomitant decreases in the O:Ti ratio and H content but it does not result in complete densification. Film densities are consistently higher for films annealed under dynamic vacuum compared to those in air.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 425
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Uhlmann, D.R. and Rajendran, G.P., in Ultrastructure Processing of Advanced Ceramics, edited by Mackenzie, J.D. and Ulrich, D.R. (Wiley, New York, 1988) pp. 241–253.Google Scholar
2. Brinker, C.J., Hurd, A.J., Ward, K.J., ibid, pp 223–240.Google Scholar
3. Chu, W.-K., Mayer, J.W., Nicolet, M.-A., Backscattering Spectrometry, (Academic, New York, 1978).Google Scholar
4. Leavitt, J.A., McIntyre, L.C., Ashbaugh, M.D., Dezfouly, B., Oder, J.G., Applied Optics, 28, 2762 (1989).Google Scholar
5. Doolittle, L., Nucl. Instrum. & Methods, B9, 344 (1985).Google Scholar
6. Keddie, J.L. and Giannelis, E.P., unpublishedGoogle Scholar
7. Keddie, J.L. and Giannelis, E.P., presented at the 1989 ACS Meeting, Indianapolis, IN, 1989 (to be submitted).Google Scholar