Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Sharpe, William N.
2003.
Murray lecture tensile testing at the micrometer scale: Opportunities in experimental mechanics.
Experimental Mechanics,
Vol. 43,
Issue. 3,
p.
228.
Moon, H.-S.
Choi, D.
and
Spearing, S.M.
2004.
Development of Si–SiC Hybrid Structures for Elevated Temperature Micro-Turbomachinery.
Journal of Microelectromechanical Systems,
Vol. 13,
Issue. 4,
p.
676.
Dirras, G.F.
Djemia, P.
Roussigné, Y.
and
Jackson, K.M.
2004.
Investigating the elastic properties of β-SiC films.
Materials Science and Engineering: A,
Vol. 387-389,
Issue. ,
p.
302.
Spearing, S
2005.
Modeling and Structural Design of High Temperature MEMS Components - Perspectives on Models for Aerospace Materials.
Gaspar, J.
Schmidt, M.E.
Held, J.
and
Paul, O.
2009.
Wafer-Scale Microtensile Testing of Thin Films.
Journal of Microelectromechanical Systems,
Vol. 18,
Issue. 5,
p.
1062.
Cimalla, Volker
Röhlig, C. C.
Lebedev, V.
Ambacher, Oliver
Tonisch, Katja
Niebelschütz, Florentina
Brueckner, Klemens
and
Hein, Matthias A.
2010.
AlGaN/GaN Based Heterostructures for MEMS and NEMS Applications.
Solid State Phenomena,
Vol. 159,
Issue. ,
p.
27.
Brueckner, K.
Niebelschuetz, F.
Tonisch, K.
Foerster, Ch.
Cimalla, V.
Stephan, R.
Pezoldt, J.
Stauden, T.
Ambacher, O.
and
Hein, M. A.
2011.
Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications.
physica status solidi (a),
Vol. 208,
Issue. 2,
p.
357.
Berdova, Maria
Ylitalo, Tuomo
Kassamakov, Ivan
Heino, Jouni
Törmä, Pekka T.
Kilpi, Lauri
Ronkainen, Helena
Koskinen, Jari
Hæggström, Edward
and
Franssila, Sami
2014.
Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques.
Acta Materialia,
Vol. 66,
Issue. ,
p.
370.
Middelburg, Luke M.
van Zeijl, H. W.
Vollebregt, Sten
Morana, Bruno
and
Zhang, Guoqi
2020.
Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration.
IEEE Sensors Journal,
Vol. 20,
Issue. 19,
p.
11265.
Truong, Thanh An
Huang, Xinghao
Barton, Matthew
Ashok, Aditya
Al Abed, Amr
Almasri, Reem
Shivdasanic, Mohit N.
Reshamwala, Ronak
Ingles, Joshua
Thai, Mai Thanh
Nguyen, Chi Cong
Zhao, Sinuo
Zhang, Xiuwen
Gu, Zi
Vasanth, Arya
Peng, Shuhua
Nguyen, Tuan-Khoa
Do, Nho
Nguyen, Nam-Trung
Zhao, Hangbo
and
Phan, Hoang-Phuong
2025.
Flexible Electrode Arrays Based on a Wide Bandgap Semiconductors for Chronic Implantable Multiplexed Sensing and Heart Pacemakers.
ACS Nano,