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Material Characterisation of a Novel Permeation Barrier for Flexible Organic Displays

Published online by Cambridge University Press:  17 March 2011

Jonathan Gartside ,
Prashant Mandlik ,
Sigurd Wagner ,
Teddy Zhou ,
Jeff Silvernail  and
Mike Hack
Jonathan Gartside
Affiliation:
Department of Electrical Engineering, Princeton University, Engineering Quadrangle, Olden Street, Princeton, NJ, 08544
Prashant Mandlik
Affiliation:
Department of Electrical Engineering, Princeton University, Engineering Quadrangle, Olden Street, Princeton, NJ, 08544
Sigurd Wagner
Affiliation:
Department of Electrical Engineering, Princeton University, Engineering Quadrangle, Olden Street, Princeton, NJ, 08544
Teddy Zhou
Affiliation:
Universal Display Corporation, Ewing, NJ, 08618
Jeff Silvernail
Affiliation:
Universal Display Corporation, Ewing, NJ, 08618
Mike Hack
Affiliation:
Universal Display Corporation, Ewing, NJ, 08618
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Abstract

Encapsulation for flexible organic light emitting diodes (OLEDs) is an area of active research. Multilayer barriers, with alternating organic and inorganic layers, currently offer the best resistance to oxygen and water ingression. However, the complexity of the multilayer structure makes the deposition costly and time-consuming. Here we report an effective single-compound barrier layer deposited by single-chamber plasma enhanced chemical vapour deposition (PE-CVD) from hexamethyl disiloxane (HMDSO) and oxygen source gases. The barrier layer has displayed excellent permeation resistance, with coated OLED devices surviving over 1000 hours in accelerated shelf-life tests (65°C and 85% relative humidity) in near perfect condition. Material characterisation detailed in this paper indicates that the material is an inorganic-polymer hybrid, combining the permeation resistance of an oxide with the flexibility of a polymer. The surface characteristics, chemical composition and mechanical properties of the novel barrier material are investigated with variation in PE-CVD deposition conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1007: Symposium S – Organic/Inorganic Hybrid Materials-2007 , 2007 , 1007-S07-06
Copyright
Copyright © Materials Research Society 2007

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References

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