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Laser Ablation-Molecular Beam System. Reactions of Electrons or Ions From Metal Substrates With Organometallic, Metal Carbonyl and Organic Molecules

Published online by Cambridge University Press:  26 February 2011

Kenzo Toya ,
Tadashi Oka ,
Masahiro Kawasaki  and
Hiroyasu Sato
Kenzo Toya
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Tadashi Oka
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Masahiro Kawasaki
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Hiroyasu Sato
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
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Abstract

Laser light (the second or third harmonics from an Nd:YAG laser) was focussed on the metal substrate in vacuum. A pulsed molecular beam of an organometallic compound, a metal carbonyl, or an organic molecule was introduced in the entrance region (the region in front of the ion-lens assembly) of a quadrupole mass filter which was located near the metal substrate. The reaction of the molecules in the beam with either the electrons or ions from the metal substrate was studied by monitoring the product ions by the mass spectrometer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 231
Copyright
Copyright © Materials Research Society 1998

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References

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