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Integrating Bipolar Junction Transistors with Silicon-Based Light-Emitting Devices

Published online by Cambridge University Press:  15 February 2011

K. D. Hirschman ,
L. Tsybeskov ,
S. P. Duttagupta  and
P. M. Fauchet
K. D. Hirschman
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627
L. Tsybeskov
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627
S. P. Duttagupta
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627
P. M. Fauchet
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627
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Abstract

Silicon-based optoelectronic devices enable the realization of optoelectronic systems that are compatible with integrated circuit manufacturing technology. This work reports on silicon-based visible light-emitting devices (LEDs) that have been successfully integrated into a standard bipolar fabrication sequence. The basic LED structure consists of a 0.5–1.0μm thick silicon-rich silicon oxide (SRSO) active light-emitting layer formed on a p-type silicon wafer by partial oxidation of porous silicon (PSi), with an n+ doped polysilicon cathode. The LEDs exhibit bright electroluminescence (EL) with a spectral peak between 1.75 and 1.90e. The LEDs are connected in a common-emitter configuration to integrated vertical pnp bipolar driver transistors. This is the first demonstration of an all-silicon visible light emitter / bipolar transistor optoelectronic integrated circuit. The LED device fabrication, process integration, and optoelectronic device characteristics are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 452 , 1996 , 705
Copyright
Copyright © Materials Research Society 1997

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Footnotes

*

also Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester, NY 14623

†

also Laboratory for Laser Energetics, Department of Physics & Astronomy, and The Institute of Optics, University of Rochester, Rochester NY 14627

References

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