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In-situ Analysis of the Chemical Vapor Synthesis of Nanocrystalline Silicon Carbide by Aerosol Mass Spectrometry

Published online by Cambridge University Press:  15 March 2011

In-Kyum Lee ,
Markus Winterer ,
Horst Hahn ,
Christian Janzen ,
Dirk Lindackers  and
Paul Roth
In-Kyum Lee
Affiliation:
Darmstadt University of Technology, Institute of Materials Science, Petersenstr. 23, 64287 Darmstadt, Germany
Markus Winterer
Affiliation:
Darmstadt University of Technology, Institute of Materials Science, Petersenstr. 23, 64287 Darmstadt, Germany
Horst Hahn
Affiliation:
Darmstadt University of Technology, Institute of Materials Science, Petersenstr. 23, 64287 Darmstadt, Germany
Christian Janzen
Affiliation:
Institut of Combustion and Gasdynamics, Gerhard-Mercator University, 47048 Duisburg, Germany
Dirk Lindackers
Affiliation:
Institut of Combustion and Gasdynamics, Gerhard-Mercator University, 47048 Duisburg, Germany
Paul Roth
Affiliation:
Institut of Combustion and Gasdynamics, Gerhard-Mercator University, 47048 Duisburg, Germany
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Abstract

An Aerosol Mass Spectrometer (AMS) is a combination of a Quadrupol- (QMS) and a Particle Mass Spectrometer (PMS) and enables the in-situ analysis of gas phase processes for the generation of nanoparticles. Size distributions of ultrafine silicon carbide particles in the range of 104 atomic mass units (amu) to 107 amu are measured in the PMS. Simultaneously, molecular species up to 300 amu can be detected in the QMS. Aerosols containing nanocrystalline silicon carbide are produced from tetramethylsilane (TMS) by thermal decomposition. In situ process analysis with the AMS as a function of process parameters was performed to elucidate the formation and growth mechanism of SiC nanoparticles.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 703: Symposia U/V – Nanophase and Nanocomposite Materials IV , 2001 , V4.6
Copyright
Copyright © Materials Research Society 2002

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References

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