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In Situ Electron Spectroscopic Identification of Carbon Species Deposited by Laser Ablation

Published online by Cambridge University Press:  15 February 2011

E. C. Samano ,
Gerardo Soto ,
Arturo Gamietea  and
Leonel Cota
E. C. Samano
Affiliation:
Laboratorio de Ensenada, IFUNAM, A. P. 2681, 22800 Ensenada, B.C., México.
Gerardo Soto
Affiliation:
Also at Programa de Posgrado en Física de Materiales, Centro de Investigación Científica y de Educación Superior de Ensenada, 22800 Ensenada, B.C., México.
Arturo Gamietea
Affiliation:
Laboratorio de Ensenada, IFUNAM, A. P. 2681, 22800 Ensenada, B.C., México.
Leonel Cota
Affiliation:
Laboratorio de Ensenada, IFUNAM, A. P. 2681, 22800 Ensenada, B.C., México.
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Abstract

Thin carbon films were grown on Si (111) substrates by ablating a graphite target utilizing an excimer pulsed laser in a UHV Riber © LDM-32 system. Two kinds of films were produced, a highly oriented pyrolytic graphite (HOPG) type and a diamond-like carbon (DLC) type. A relationship of the films microstructure with laser power density and substrate conditions was observed. The HOPG films were homogeneous but the DLC films were heterogeneous, as shown by micrographs. The thin films are monitored and analyzed in situ during the first stages of the deposition process. The monitoring was done by RHEED and the characterization by several surface spectroscopic techniques, AES, XPS and EELS. The formation of a SiC interface was observed for both films due to the reaction of the first carbon species with the substrate surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 339
Copyright
Copyright © Materials Research Society 1997

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