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Published online by Cambridge University Press: 01 January 1992
By using a Van de Graaff accelerator we have implanted 2 MeV protons and deuterons into InP samples. These implanted samples were annealed in 50 °C increments in the 200 to 600 °C temperature range for 30 minutes each and then measured by the infrared absorption spectroscopy. A group of four different local vibrational mode absorption lines is observed, each of which arises from the hydrogen-phosphorus stretching vibration with different defects or impurities at nearest-neighbor sites. Each mode exhibits an annealing behavior which is different than any of the other absorption lines. The annealing results are shown and discussed in terms of Green's function calculations of the defects responsible for the two absorption lines.