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High Current Density Electron Beam Induced Desorption

Published online by Cambridge University Press:  25 February 2011

S.D. Berger ,
J.M. Macaulay ,
L.M. Brown  and
R.M. Allen
S.D. Berger
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
J.M. Macaulay
Affiliation:
Cavendish Laboratory, Madingley Road, Cambridge, CB3 OHE, UK
L.M. Brown
Affiliation:
Cavendish Laboratory, Madingley Road, Cambridge, CB3 OHE, UK
R.M. Allen
Affiliation:
Cavendish Laboratory, Madingley Road, Cambridge, CB3 OHE, UK
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Abstract

High current density electron beam irradiation with a small probe can lead to the production of holes in a variety of inorganic materials. We review some of the experimental observations of the hole formation process and compare these to the predictions of a simple model.

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References

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