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Growth and Structure of in-plane Textured MgO Thin Films Deposited on Amorphous Substrates using ion-beam-assisted E-Beam Evaporation

Published online by Cambridge University Press:  10 February 2011

Connie P. Wang ,
Khiem B. Do ,
Ann F. Marshall ,
Theodore H. Geballe ,
Malcolm R. Beasley  and
Robert H. Hammond
Connie P. Wang
Affiliation:
Ginzton Laboratory, Stanford, CA
Khiem B. Do
Affiliation:
Ginzton Laboratory, Stanford, CA
Ann F. Marshall
Affiliation:
Center of Materials Research, Stanford University, Stanford, CA
Theodore H. Geballe
Affiliation:
Ginzton Laboratory, Stanford, CA
Malcolm R. Beasley
Affiliation:
Ginzton Laboratory, Stanford, CA
Robert H. Hammond
Affiliation:
Ginzton Laboratory, Stanford, CA
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Abstract

In-plane aligned MgO thin films (∼100Å) have been obtained on various amorphous substrates by Ar+ ion-assisted electron-beam evaporation. Based on RHEED and cross-section TEM, we have shown that the MgO texture appears at a very early stage of film growth and is optimized at a thickness of around 100Å. Optimal thickness is the stage at which the surface is fully covered by MgO crystallites. The planar-view TEM of grain structure evolution in samples at different stages of growth reveals the dynamics of the texture developing process. Small, (100)-faceted MgO grains were observed both in planar-view and cross-section TEM images.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 504: Symposium KK – Atomistic Mechanisms in Beam Synthesis & Irradiation… , 1997 , 301
Copyright
Copyright © Materials Research Society 1998

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References

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