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Frequency Response of Microcantilevers in Viscous Fluids

Published online by Cambridge University Press:  01 February 2011

A. M. Schilowitz ,
D. G. Yablon  and
F. Zypman
A. M. Schilowitz
Affiliation:
ExxonMobil Research and Eng. Co., Annandale, NJ
D. G. Yablon
Affiliation:
ExxonMobil Research and Eng. Co., Annandale, NJ
F. Zypman
Affiliation:
Yeshiva University, NY, NY
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Abstract

This paper presents a new, general reconstruction algorithm that enables modeling of the experimental resonance spectrum of a prismatic microcantilever in a viscous fluid. A closed-form solution is obtained for the microcantilever frequency response from the equation of motion with fluid damping and internal friction terms, which allows direct calculation of the fluid damping and internal friction damping constants. In principle, the fluid damping constant has a simple relationship to viscosity thus potentially simplifying the process of obtaining viscosity from experimental data. Finally, the model is compared to experimental data.

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References

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