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Excimer Laser Induced Damage in Stressed Polyimide Films Exposed in Air

Published online by Cambridge University Press:  26 February 2011

K. Tonyali ,
L. C. Jensen  and
J. T. Dickinson
K. Tonyali
Affiliation:
Department of PhysicsWashington State UniversityPullman, WA 99164-2814
L. C. Jensen
Affiliation:
Department of PhysicsWashington State UniversityPullman, WA 99164-2814
J. T. Dickinson
Affiliation:
Department of PhysicsWashington State UniversityPullman, WA 99164-2814
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Abstract

In earlier work we reported the consequences of simultaneous exposure of polymers to mechanical stress and electron bombardment. In this study we examine the response of highly stressed polyimide films to excimer laser radiation (20 ns pulses @ 248 nm wavelength) in air. The exposed surfaces show evidence of surface and near surface damage, crack initiation, and eventually crack growth over a wide range of applied stress and laser fluence. These results show that the morphology of the stressed material has a significant influence on the resulting damage and suggest that the regions of highest damage are those experiencing the highest local stress. A growth of nodules on the polyimide surface are also observed which are missing when exposed in vacuum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 665
Copyright
Copyright © Materials Research Society 1988

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References

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