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Effect of Deposition and Annealing on The Thermomechanical Properties of Parylene Films

Published online by Cambridge University Press:  15 February 2011

E. Todd Ryan ,
Mikel Miller  and
Paul S. Ho
E. Todd Ryan
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, Texas 78712
Mikel Miller
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, Texas 78712
Paul S. Ho
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, Texas 78712
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Abstract

Parylene polymers are vapor deposited and form semicrystalline films. The properties of these films vary with chemical structure, molecular weight, and morphology. The properties of parylene films deposited by changing the standard deposition process are evaluated and compared to control films. The thermomechanical properties of films produced by three modified processes, A, P, and PC, indicate the modified processes reduce the molecular weight. The films were also annealed to determine the stability of the film's properties during thermal cycling. These results also suggest that the modified films are lower molecular weight materials.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 476: Symposium N – Low-Dielectric Constant Materials III , 1997 , 225
Copyright
Copyright © Materials Research Society 1997

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References

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