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Diffusion and Solubility of Hydrogen in Amorphous and Microcrystalline Si:H Films

Published online by Cambridge University Press:  17 March 2011

Wolfhard Beyer
Wolfhard Beyer*
Affiliation:
Institut für Photovoltaik, Forschungszentrum Jülich, D-52425 Jülich, Germany
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Abstract

Hydrogen diffusion and solubility effects in hydrogenated amorphous and microcrystalline silicon films are reviewed. Various diffusion-related effects have been observed which need to be considered in models of hydrogen diffusion. Hydrogen solubility is found to affect hydrogen incorporation and hydrogen transport.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 664: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2001 , 2001 , A13.1
Copyright
Copyright © Materials Research Society 2001

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References

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