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Dielectric Properties of Multi-Layer High-K Polymer Composite Films

Published online by Cambridge University Press:  17 March 2011

Wataru Sakai  and
C. K. Chiang
Wataru Sakai
Affiliation:
Polymers Division, National Institute of Standards and Technology Gaithersburg, Maryland 20899-8541, US
C. K. Chiang
Affiliation:
Polymers Division, National Institute of Standards and Technology Gaithersburg, Maryland 20899-8541, US
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Abstract

The electrical properties of thin polymer films are key parameters in the design of both smaller and faster circuit devices in the microelectronics industry. In this study, we made a three-layer film structure, ABA', to investigate the dielectric interaction between two high-K dielectric polymer thin films, A and A', as a function of the thickness of the middle B layer. The Cole-Cole plot showed clear changes with the thickness of the middle B layer. The total capacitances were evaluated with a simple serial three capacitances model. This ABA' structure is thought to be very useful for studying mechanical and thermal properties of thin polymer film system.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 710: Symposia DD – Polymer Interfaces and Thin Films , 2001 , DD6.17.1
Copyright
Copyright © Materials Research Society 2002

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References

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