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Determination of Diffusion Parameters for Arsenic

Published online by Cambridge University Press:  25 February 2011

Michael Heinrich ,
Matthias Budil  and
Hans W. Pötzl
Michael Heinrich
Affiliation:
TU-Wien, E3598, Gußhausstraße 27-29, A-1040 Wien, Austria
Matthias Budil
Affiliation:
TU-Wien, E3598, Gußhausstraße 27-29, A-1040 Wien, Austria
Hans W. Pötzl
Affiliation:
TU-Wien, E3598, Gußhausstraße 27-29, A-1040 Wien, Austria
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Abstract

This paper deals with an analysis of the oxynitridation and direct nitridation experiments of Fahey et al.(1984[1]). The inconsistencies in the evaluation of the fiactional component of diffusion for aisenic are discussed. Using a recently developed diffusion model an explanation for the diffusion data for arsenic is given. The standard equation for analyzing diffusion under nonequilibrium conditions is shown to lead to erroneous results. A consistent treatment must account for the concentrations of arsenic, point defects and arsenic point defect pairs. Pair formation kinetics must be included. Values are presented for the diffusion constants DIAs , DVAS , and the reaction constants kIAs , kVAs depending on the fractional interstitial component of diffusion .

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References

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