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Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition

Published online by Cambridge University Press:  21 February 2011

James L. Hohman ,
Kenneth B. Keating  and
Michael J. Kelley
James L. Hohman
Affiliation:
Central Research & Engineering Laboratories, E.I.du Pont de Nemours & Co. Inc., Wilmington, DE 19880–0304
Kenneth B. Keating
Affiliation:
Central Research & Engineering Laboratories, E.I.du Pont de Nemours & Co. Inc., Wilmington, DE 19880–0304
Michael J. Kelley
Affiliation:
Central Research & Engineering Laboratories, E.I.du Pont de Nemours & Co. Inc., Wilmington, DE 19880–0304
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Abstract

Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.H.M.Phillips, D.L.Callahan, R.Sauerbrey, G.Szabo and Z.Bor; Appl.Phys.Lett.58, 2761 (1991).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 571
Copyright
Copyright © Materials Research Society 1995

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