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Colloidal Silica based High Selectivity Shallow Trench Isolation (STI) Chemical Mechanical Polishing (CMP) Slurry

Published online by Cambridge University Press:  01 February 2011

Kyoung-Ho Bu  and
Brij M. Moudgil
Kyoung-Ho Bu
Affiliation:
Particle Engineering Research Center, Department of Materials Science and Engineering University of Florida, Gainesville, Florida 32611, USA
Brij M. Moudgil
Affiliation:
Particle Engineering Research Center, Department of Materials Science and Engineering University of Florida, Gainesville, Florida 32611, USA
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Abstract

Among various properties of chemical mechanical polishing (CMP) slurry, selectivity plays a key role in global planarization of high density and small pattern size shallow trench isolation (STI) process. Lack of adequate selectivity can lead to defects such as dishing and erosion. To improve the selectivity of STI CMP process, CMP characteristics of silica and silicon nitride wafer were investigated using colloidal silica slurry as a function of slurry pH. Sodium dodecyl sulfate (SDS), an anionic surfactant, was added to increase the selectivity of the slurry. As a result, selectivity increased from 3 to 25. It was concluded that selective passivation layer formed on silicon nitride wafer surface at acidic slurry pH range was responsible for the observed selectivity increase. Adsorption characteristics of SDS on silica and silicon nitride were measured as a function of slurry pH and concentration of SDS. As indicated by zeta potential behavior under acidic pH conditions, SDS adsorption on silicon nitride was significantly higher han silica due to the electrostatic forces. Significantly higher SDS coating on silicone nitride seems to have resulted in lubrication layer leading to increased polishing selectivity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 867: Symposium W – Chemical-Mechanical Planarization-Integration, Technology and Reliability , 2005 , W8.5
Copyright
Copyright © Materials Research Society 2005

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References

[1] Kim, S. Y., Lee, K.J., and Seo, Y.J., “In-situ end point detection of the STI-CMP process using a high selectivity slurry,” Microelectronic Engineering, 66 p. 463–471 (2003).Google Scholar
[2] Martin, A., Spinolo, G., Morin, S., Bacchetta, M., Figerio, F., Bonner, B. A., Mckeever, P., Tremolada, M., and Iyer, A., “The Development of a Direct-Polish Process for STI CMP,” Mat. Res. Soc. Symp. Proc. 767 p. F5.10–F5.10.6 (2003).Google Scholar
[3] Bonner, B. A., Iyer, A., Kumar, D., Zhang, B., Osterheld, T. H., and Nickles, A. S., “Improved Direct Polish STI CMP Process With High Selectivity Slurry: Reduced Miroscraching & Increased Productivity,” CMP-MIC March (2002).Google Scholar
[4] Basim, G. B., “Formulation of Engineered Particulate Systems for Chemical Mechanical Polishing Applications”, Ph.D. Thesis, University of Florida (2002).Google Scholar
[5] Vakarelski, I. U., Brown, S. C., Rabinovich, Y. I., and Moudgil, B. M., “Lateral Force Microscopy Investigation of Surfactant Mediated Lubrication from aqueous Solution,” Langmuir, 20 (5); 1724–1731 (2004).Google Scholar
[6] Celik, M. S., Hancer, M., and Miller, J. D., “Flotation Chemistry of Boron Minerals,” J. Colloid and Interface Sci. 256, 121–131 (2002)Google Scholar
[7] Bremmell, K. E., Fornasiero, D., and Ralston, J., “Pentlandite-lizardite interactions and implications for their separation by flotation,” Colloids and Surfaces A: Physicochem. Eng. Aspects, 252 p. 204–212 (2005).Google Scholar
[8] Bergström, L. and Bostedt, E., “Surface Chemistry of Silicon Nitride Powders: Electrokinetic Behaviour and ESCA Studies,” Colloids and Surfaces, 49 p. 183–197 (1990).Google Scholar
[9] Choi, W., “Study of Interfacial Interaction during Chemical Mechanical Polishing (CMP) of Dielectric Silicon dioxide,” Ph.D. Thesis, University of Florida (2003).Google Scholar