Published online by Cambridge University Press: 21 February 2011
In this paper we discuss results for the clustering of Ga on GaAs(001). The dominant dynamic process which drives this system toward this three dimensional equilibrium changes from Ostwald ripening at low deposition rates to coalescence at higher deposition rates. The experimental data allow us to test several theoretical predictions for cluster size distributions based on a detailed study of the microscopic processes. These include, at higher deposition rates, the observation of local ripening effects and diffusion limited growth.