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Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test

Published online by Cambridge University Press:  05 June 2020

Kosuke Suzuki ,
Tso-Fu Mark Chang Open the ORCID record for Tso-Fu Mark Chang [Opens in a new window] ,
Ken Hashigata ,
Keisuke Asano ,
Chun-Yi Chen ,
Takashi Nagoshi ,
Daisuke Yamane ,
Hiroyuki Ito ,
Katsuyuki Machida  and
Kazuya Masu
...Show all authors
Kosuke Suzuki
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Tso-Fu Mark Chang*
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Ken Hashigata
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Keisuke Asano
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Chun-Yi Chen
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Takashi Nagoshi
Affiliation:
National Institute of Advanced Industrial Science and Technology, Tsukuba305-8560, Japan
Daisuke Yamane
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Hiroyuki Ito
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Katsuyuki Machida
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Kazuya Masu
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
Masato Sone
Affiliation:
Institute of Innovative Research, Tokyo Institute of Technology, Yokohama226-8503, Japan
*
Address all correspondence to Tso-Fu Mark Chang at chang.m.aa@m.titech.ac.jp
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Abstract

Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 μm are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 μm. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.

Type
Research Letters
Information
MRS Communications , Volume 10 , Issue 3 , September 2020 , pp. 434 - 438
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Copyright
Copyright © Materials Research Society, 2020

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