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Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Published online by Cambridge University Press:  26 February 2019

Kazuhiro Takahashi ,
Toshinori Fujie ,
Reina Teramoto ,
Isao Takahashi ,
Nobutaka Sato ,
Shinji Takeoka  and
Kazuaki Sawada
Kazuhiro Takahashi*
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan JST PRESTO, Chiyoda, Tokyo 102-0076, Japan
Toshinori Fujie*
Affiliation:
JST PRESTO, Chiyoda, Tokyo 102-0076, Japan School of Life Science and Technology, Tokyo Institute of Technology, B-50, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8501, Japan Waseda Institute for Advanced Study, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan
Reina Teramoto
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan
Isao Takahashi
Affiliation:
Department of Life Science and Medical Bio-Science, Graduate School of Advanced Science and Engineering, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan
Nobutaka Sato
Affiliation:
Department of Life Science and Medical Bio-Science, Graduate School of Advanced Science and Engineering, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan
Shinji Takeoka
Affiliation:
Department of Life Science and Medical Bio-Science, Graduate School of Advanced Science and Engineering, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan
Kazuaki Sawada
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan
*
Address all correspondence to Kazuhiro Takahashi, Toshinori Fujie at takahashi@ee.tut.ac.jp; t_fujie@bio.titech.ac.jp
Address all correspondence to Kazuhiro Takahashi, Toshinori Fujie at takahashi@ee.tut.ac.jp; t_fujie@bio.titech.ac.jp
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Abstract

We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

Type
Research Letters
Information
MRS Communications , Volume 9 , Issue 1 , March 2019 , pp. 381 - 389
Copyright
Copyright © Materials Research Society 2019 

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Footnotes

*

This author was an editor of this journal during the review and decision stage. For the JMR policy on review and publication of manuscripts authored by editors, please refer to http://www.mrs.org/editor-manuscripts/.

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