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200 mm wafer-scale fabrication of polydimethylsiloxane fluidic devices for fluorescence imaging of single DNA molecules

Published online by Cambridge University Press:  11 April 2018

Sung-Wook Nam Open the ORCID record for Sung-Wook Nam [Opens in a new window]
Sung-Wook Nam*
Affiliation:
Department of Molecular Medicine, School of Medicine, Kyungpook National University, Daegu 41405, South Korea
*
Address all correspondence to S.-W. Nam at nams@knu.ac.kr
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Abstract

We report fabrication of 200 mm silicon (Si)-wafer mold structure for polydimethylsiloxane (PDMS) microfluidic devices to demonstrate a real-time fluorescence imaging of single DNA molecules. Conventional photolithography with deep reactive ion etching process allows us to build a “mesa”-type Si mold with a nanoscallop sidewall geometry aiding PDMS residue-free process. By optimizing fluorescence microscopy with the fabricated PDMS chamber, we obtain a protocol to visualize the motions of single DNA molecules. This integrative PDMS-based single-molecule imaging system can, in principle, be used as a platform to study biochemical reactions occurring in proteins, nucleotides, and vesicles.

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Research Letters
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MRS Communications , Volume 8 , Issue 2 , June 2018 , pp. 420 - 427
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Copyright © Materials Research Society 2018 

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