Silicon Nitride Membrane Dynamic Masking Allows Improved Shapes of Near-Field Optical Apertures Fabricated by FIB

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Type: Research/Researchers
Information: MRS Bulletin , Volume 34 , Issue 1: Materials Challenges for Advanced Nuclear Energy Systems , January 2009 , pp. 5 - 6

DOI: https://doi.org/10.1557/mrs2009.5 [Opens in a new window]

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Silicon Nitride Membrane Dynamic Masking Allows Improved Shapes of Near-Field Optical Apertures Fabricated by FIB

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Silicon Nitride Membrane Dynamic Masking Allows Improved Shapes of Near-Field Optical Apertures Fabricated by FIB

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