Serpentine-Patterned Compliant Thin Films of Stiff Materials Reduce Strain During Stretching

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Type: Research‏Researchers
Information: MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 925

DOI: https://doi.org/10.1557/mrs2005.268 [Opens in a new window]

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Serpentine-Patterned Compliant Thin Films of Stiff Materials Reduce Strain During Stretching

Volume 30, Issue 12
Gopal Rao
DOI: https://doi.org/10.1557/mrs2005.268

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Serpentine-Patterned Compliant Thin Films of Stiff Materials Reduce Strain During Stretching

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